Optical metrology for precision engineering

This book provides readers the fundamentals of optical metrology for precision engineering. The next-generation measurement technologies based on ultrashort pulse laser and optical frequency comb are also presented, making it an essential reference book for various engineering fields.

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Bibliographic Details
Main Authors: Gao, Wei, 1965- (Author, http://id.loc.gov/vocabulary/relators/aut), Shimizu, Yuki, (http://id.loc.gov/vocabulary/relators/aut)
Format: eBook
Language: English
Published: Berlin ; Boston : De Gruyter, [2022]
Subjects:
ISBN: 9783110542363
3110542366
3110541270
9783110541274
9783110541090
3110541092
Physical Description: 1 online resource (XI, 644 pages)

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