Handbook of silicon based mems materials and technologies
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| Other Authors | |
|---|---|
| Format | Electronic eBook |
| Language | English |
| Published |
Amsterdam :
Elsevier,
2020.
|
| Edition | Third edition. |
| Series | Micro & nano technologies.
|
| Subjects | |
| Online Access | Full text |
| ISBN | 9780128177877 012817787X 9780128177860 0128177861 |
| Physical Description | 1 online resource |
Glossary of Terms