Handbook of silicon based mems materials and technologies

• Other Authors: Tilli, Markku, (Editor)
• Format: eBook
• Language: English
• Published: Amsterdam : Elsevier, 2020.
• Edition: Third edition.
• Series: Micro & nano technologies.
• Subjects: Microelectromechanical systems.; Silicon.; elektronické knihy; electronic books
• ISBN: 9780128177877; 012817787X; 9780128177860; 0128177861
• Physical Description: 1 online resource