Principles of lithography

• Main Author: Levinson, Harry J., (Author)
• Format: eBook
• Language: English
• Published: Bellingham, Washington, USA : SPIE Press, [2019]
• Edition: Fourth edition.
• Subjects: Integrated circuits > Design and construction.; Microlithography.; elektronické knihy; electronic books
• ISBN: 9781510627611; 1510627618; 9781510627628; 1510627626; 9781510627635; 1510627634; 9781510627604; 151062760X
• Physical Description: 1 online resource

"This text is intended to serve as an introduction to the science of microlithography, but also covers several subjects in depth, making it useful to the experienced lithographer as well. Topics directly related to manufacturing tools are addressed, including overlay, the stages of exposure, to...