Principles of lithography
"This text is intended to serve as an introduction to the science of microlithography, but also covers several subjects in depth, making it useful to the experienced lithographer as well. Topics directly related to manufacturing tools are addressed, including overlay, the stages of exposure, to...
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| Main Author | |
|---|---|
| Format | Electronic eBook |
| Language | English |
| Published |
Bellingham, Washington, USA :
SPIE Press,
[2019]
|
| Edition | Fourth edition. |
| Subjects | |
| Online Access | Full text |
| ISBN | 9781510627611 1510627618 9781510627628 1510627626 9781510627635 1510627634 9781510627604 151062760X |
| Physical Description | 1 online resource |
Glossary of Terms