Handbook of silicon wafer cleaning technology

• Other Authors: Reinhardt, Karen A. (Editor), Kern, Werner, 1925- (Editor)
• Format: Electronic eBook
• Language: English
• Published: Cambridge, MA : William Andrew, [2018]
• Edition: Third edition.
• Series: Materials science and process technology series.
• Subjects: Silicon-on-insulator technology.; elektronické knihy; electronic books
• ISBN: 9780323510851; 032351085X; 9780323510844; 0323510841
• Physical Description: 1 online resource

Handbook of Silicon Wafer Cleaning Technology, Third Edition, provides an in-depth discussion of cleaning, etching and surface conditioning for semiconductor applications. The fundamental physics and chemistry associated with wet and plasma processing are reviewed, including surface and colloidal as...