Handbook of thin film deposition

• Other Authors: Seshan, Krishna, (Editor), Schepis, Dominic, (Editor)
• Format: eBook
• Language: English
• Published: Oxford, United Kingdom ; Cambridge, MA, United States : William Andrew, an imprint of Elsevier, [2018]
• Edition: Fourth edition.
• Subjects: Thin films > Handbooks, manuals, etc.; Thin film devices > Design and construction.; elektronické knihy; electronic books
• ISBN: 9780128123126; 0128123125; 9780128123119; 0128123117
• Physical Description: 1 online resource

Handbook of thin film deposition, Fourth edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, materials f...