EUV lithography

Extreme ultraviolet lithography (EUVL) is the principal lithography technology aiming to manufacture computer chips beyond the current 193-nm-based optical lithography, and recent progress has been made on several fronts: EUV light sources, optics, optics metrology, contamination control, masks and...

Full description

Saved in:
Bibliographic Details
Other Authors Bakshi, Vivek (Editor)
Format Electronic eBook
LanguageEnglish
Published Bellingham, Washington, USA : SPIE Press, [2018]
EditionSecond edition.
SeriesSPIE Press monograph ; PM283.
Subjects
Ultraviolet radiation > Industrial applications.
Photolithography.
Optical coatings.
elektronické knihy
electronic books
Online AccessFull text
ISBN9781510616790
1510616799
9781510616783
1510616780
9781510616806
1510616802
9781510616813
1510616810
Physical Description1 online resource (xxvii, 758 pages)

Cover

Similar Items