EUV lithography

Extreme ultraviolet lithography (EUVL) is the principal lithography technology aiming to manufacture computer chips beyond the current 193-nm-based optical lithography, and recent progress has been made on several fronts: EUV light sources, optics, optics metrology, contamination control, masks and...

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Bibliographic Details
Other Authors: Bakshi, Vivek, (Editor)
Format: eBook
Language: English
Published: Bellingham, Washington, USA : SPIE Press, [2018]
Edition: Second edition.
Series: SPIE Press monograph ; PM283.
Subjects:
Ultraviolet radiation > Industrial applications.
Photolithography.
Optical coatings.
elektronické knihy
electronic books
ISBN: 9781510616790
1510616799
9781510616783
1510616780
9781510616806
1510616802
9781510616813
1510616810
Physical Description: 1 online resource (xxvii, 758 pages)

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ikona NpovdaGlossary of Terms
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