Handbook of silicon based MEMS materials and technologies

• Other Authors: Tilli, Markku, (Editor)
• Format: eBook
• Language: English
• Published: London, UK : William Andrew is an imprint of Elsevier, 2015.
• Edition: Second edition.
• Series: Micro & nano technologies.
• Subjects: Microelectromechanical systems.; Microelectromechanical systems > Materials.; Silicon > Electric properties.; elektronické knihy; electronic books
• ISBN: 9780323312233; 0323312233; 0323299652; 9780323299657
• Physical Description: 1 online resource : illustrations

The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains...