Developments in surface contamination and cleaning. Volume 7, Cleanliness validation and verification /

• Other Authors: Kohli, Rajiv, 1947- (Editor), Mittal, K. L., 1945- (Editor)
• Format: eBook
• Language: English
• Published: Amsterdam : Elsevier, 2015.
• Edition: First edition.
• Subjects: Surfaces (Technology); Surface contamination > Prevention.; Cleaning.; elektronické knihy; electronic books
• ISBN: 9780323311458; 0323311458; 0323313035; 9780323313032
• Physical Description: 1 online resource (207 pages)

As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning a...