Developments in surface contamination and cleaning. Volume 8, Cleaning techniques /

• Other Authors: Kohli, Rajiv, 1947-, Mittal, K. L., 1945-
• Format: eBook
• Language: English
• Published: Amsterdam : William Andrew, 2015.
• Edition: First edition.
• Series: Developments in Surface Contamination and Cleaning Series ; Volume 8
• Subjects: Surfaces (Technology); Surface contamination > Prevention.; Particles > Measurement.; Cleaning.; Coatings.; Dust control.; elektronické knihy; electronic books
• ISBN: 9780323312714; 0323312713; 9780323299619; 032329961X
• Physical Description: 1 online resource (235 pages)

As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a who...