Hermeticity testing of MEMS and microelectronic packages

• Main Authors: Costello, Suzanne, (Author), Desmulliez, Marc P. Y., 1963- (Author)
• Format: eBook
• Language: English
• Published: Boston : Artech House, [2013]
• Series: Artech House integrated microsystems series.
• Subjects: Microelectronic packaging > Testing.; Microelectromechanical systems > Testing.; Hermetic sealing > Testing.; Microelectronics > Testing.; elektronické knihy; electronic books
• ISBN: 9781608075287; 1608075281; 9781523117284; 1523117281; 9781608075270; 1608075273
• Physical Description: 1 online resource (195 pages .)

Packaging of microelectronics has been developing since the invention of the transistor in 1947. With the increasing complexity and decreasing size of the die, packaging requirements have continued to change. A step change in package requirements came with the introduction of the Micro-Electro-Mecha...