Silicon-on-insulator (SOI) technology : manufacture and applications

• Other Authors: Kononchuk, Oleg, Nguyen, Bich-Yen
• Format: Electronic eBook
• Language: English
• Published: Cambridge, UK ; Waltham, MA : Woodhead Pub., 2014.
• Series: Woodhead Publishing series in electronic and optical materials.
• Subjects: Silicon-on-insulator technology.; elektronické knihy; electronic books
• ISBN: 9780857099259; 0857099256; 1306949130; 9781306949132; 0857095269; 9780857095268
• Physical Description: 1 online resource : illustrations

Silicon-on-insulator (SOI) is a semiconductor wafer technology that produces higher performing, lower power devices than traditional bulk silicon techniques. SOI works by placing a thin, insulating layer, such as silicon oxide between a thin layer of silicon and the silicon substrate. This process h...