NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore

• Corporate Author: International Conference on Materials for Advanced Technologies Singapore
• Other Authors: Khine, Lynn (Editor), Tsai, Julius M. (Editor)
• Format: Electronic eBook
• Language: English
• Published: Durnten-Zurich ; Enfield, NH : Trans Tech, ©2011.; ©2011
• Series: Advanced materials research ; v. 254.
• Subjects: Nanoelectromechanical systems > Congresses.; Microelectromechanical systems > Congresses.; elektronické knihy; electronic books
• ISBN: 9783038136095; 3038136093; 9781621986850; 1621986853; 9783037851456; 3037851457
• ISSN: 1022-6680 ;
• Physical Description: 1 online resource (x, 229 pages) : illustrations (some color)

The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processe...