Handbook of thin film deposition : techniques, processes, and technologies

• Other Authors: Seshan, Krishna.
• Format: eBook
• Language: English
• Published: Waltham [Mass.] : William Andrew, 2012.
• Edition: 3rd ed.
• Subjects: Thin film devices > Design and construction > Handbooks, manuals, etc.; Thin films.; Thin film devices > Design and construction.; elektronické knihy; electronic books
• ISBN: 1437778747; 9781437778748; 9781437778731; 1437778739; 1283716895; 9781283716895
• Physical Description: 1 online resource (xviii, 392 pages)

The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory...