A guide to hands-on MEMS design and prototyping

"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fa...

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Bibliographic Details
Main Author: Kubby, Joel A.
Format: eBook
Language: English
Published: Cambridge, UK ; New York : Cambridge University Press, 2011.
Subjects:
Microelectromechanical systems.
elektronické knihy
electronic books
ISBN: 9781139109895
1139109898
9781139127080
113912708X
9780511984662
0511984669
9781139114257
1139114255
9781139116428
1139116428
9781139122160
1139122169
1283295601
9781283295604
9786613295606
6613295604
1139112066
9781139112062
1139124110
9781139124119
1107219361
9781107219366
9780521889254
0521889251
9781107645790
1107645794
Physical Description: 1 online resource (xi, 166 pages, 16 unnumbered pages of plates) : illustrations (some color)

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ikona NpovdaGlossary of Terms
Online Access: Online Resources

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