A guide to hands-on MEMS design and prototyping
"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fa...
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| Main Author | |
|---|---|
| Format | Electronic eBook |
| Language | English |
| Published |
Cambridge, UK ; New York :
Cambridge University Press,
2011.
|
| Subjects | |
| Online Access | Full text |
| ISBN | 9781139109895 1139109898 9781139127080 113912708X 9780511984662 0511984669 9781139114257 1139114255 9781139116428 1139116428 9781139122160 1139122169 1283295601 9781283295604 9786613295606 6613295604 1139112066 9781139112062 1139124110 9781139124119 1107219361 9781107219366 9780521889254 0521889251 9781107645790 1107645794 |
| Physical Description | 1 online resource (xi, 166 pages, 16 unnumbered pages of plates) : illustrations (some color) |
Glossary of Terms