Principles of lithography

• Main Author: Levinson, Harry J.
• Format: Electronic eBook
• Language: English
• Published: Bellingham, Wash. : SPIE Press, ©2010.
• Edition: 3rd ed.
• Series: SPIE monograph ; PM198.
• Subjects: Integrated circuits > Design and construction.; Microlithography.; elektronické knihy; electronic books
• ISBN: 9780819483256; 0819483257; 9781628700107; 1628700106; 1680150995; 9781680150995; 9780819483249; 0819483249
• Physical Description: 1 online resource (xiv, 503 pages) : illustrations (some color)

The publication of Principles of Lithography, Third Edition just five years after the previous edition is evidence of the quickly changing and exciting nature of lithography as applied to the production of integrated circuits and other micro- and nanoscale devices. This text is intended to serve as...