Physics of radio-frequency plasmas
"Low-temperature radio-frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on phy...
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Format: | eBook |
Language: | English |
Published: |
Cambridge ; New York :
Cambridge University Press,
2011.
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ISBN: | 9780511861017 051186101X 9780511974342 0511974345 9780511856662 0511856660 9780521763004 0521763002 |
Physical Description: | 1 online resource (viii, 385 pages) : illustrations |
Online Access:
Online Resources