Physics of radio-frequency plasmas

• Main Author: Chabert, Pascal, 1969-
• Other Authors: Braithwaite, Nicholas
• Format: eBook
• Language: English
• Published: Cambridge ; New York : Cambridge University Press, 2011.
• Subjects: Low temperature plasmas.; Radio frequency.; elektronické knihy; electronic books
• ISBN: 9780511861017; 051186101X; 9780511974342; 0511974345; 9780511856662; 0511856660; 9780521763004; 0521763002
• Physical Description: 1 online resource (viii, 385 pages) : illustrations

"Low-temperature radio-frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on phy...