EUV lithography

Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This book has resulted from his many years of experience in EUVL development and from teaching this subject to future specialists. The book proceeds from an histor...

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Bibliographic Details
Other Authors: Bakshi, Vivek.
Format: eBook
Language: English
Published: Bellingham, Wash. : Hoboken, NJ : SPIE Press ; John Wiley, ©2009.
Series: SPIE monograph ; PM178.
Subjects:
Ultraviolet radiation > Industrial applications.
Photolithography.
Optical coatings.
elektronické knihy
electronic books
ISBN: 9781615837175
1615837175
9780819480705
0819480703
9780819469649
0819469645
9780470471555
0470471557
Physical Description: 1 online resource (xxvii, 673 pages) : illustrations

Cover

Table of contents

ikona NpovdaGlossary of Terms
Online Access: Online Resources

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