Optical lithography : here is why
This book is aimed at new and experienced engineers, technology managers, and senior technicians who want to enrich their understanding of the image formation physics of a lithographic system. Readers will gain knowledge of the basic equations and constants that drive optical lithography, learn the...
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| Main Author | |
|---|---|
| Corporate Author | |
| Format | Electronic eBook |
| Language | English |
| Published |
Bellingham, Wash. :
SPIE,
2010.
|
| Series | SPIE monograph ;
PM190. |
| Subjects | |
| Online Access | Full text |
| ISBN | 9780819481825 0819481823 9781615837274 1615837272 0819475602 9780819475602 |
| Physical Description | 1 online resource (xiv, 477 pages) : illustrations |
Glossary of Terms