Handbook of silicon based MEMS : materials & technologies

• Other Authors: Lindroos, Veikko
• Format: Electronic eBook
• Language: English
• Published: Norwich, N.Y. : Oxford : William Andrew ; Elsevier Science [distributor], 2010.
• Series: Micro & nano technologies.
• Subjects: Microelectromechanical systems.; Microelectromechanical systems > Materials.; Silicon > Electric properties.; elektronické knihy; electronic books
• ISBN: 9780815515944; 0815515944; 1282541145; 9781282541146; 9780815519881; 0815519885
• Physical Description: 1 online resource

A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materi...