Fundamental principles of engineering nanometrology
The principles of engineering metrology applied to the micro- and nanoscale: essential reading for all scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. The establishment of common standards will be an essentia...
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| Main Author | |
|---|---|
| Format | Electronic eBook |
| Language | English |
| Published |
Oxford : Amsterdam :
William Andrew ; Elsevier Science,
©2010.
|
| Edition | 1st ed. |
| Series | Micro & nano technologies.
|
| Subjects | |
| Online Access | Full text |
| ISBN | 9780080964546 0080964540 1437778321 9781437778328 |
| Physical Description | 1 online resource (xxvi, 321 pages) : illustrations |
Glossary of Terms