Micro mechanical systems : principles and technology
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution...
Saved in:
| Other Authors | , |
|---|---|
| Format | Electronic eBook |
| Language | English |
| Published |
Amsterdam ; New York :
Elsevier,
1998.
|
| Series | Handbook of sensors and actuators ;
v. 6. |
| Subjects | |
| Online Access | Full text |
| ISBN | 9780080536545 0080536549 9780444823632 0444823638 1282284975 9781282284975 9786612284977 6612284978 |
| Physical Description | 1 online resource (viii, 268 pages) : illustrations |
Glossary of Terms