Micro mechanical systems : principles and technology

• Other Authors: Fukuda, T. 1948-, Menz, W.
• Format: eBook
• Language: English
• Published: Amsterdam ; New York : Elsevier, 1998.
• Series: Handbook of sensors and actuators ; v. 6.
• Subjects: Microelectromechanical systems > Handbooks, manuals, etc.; elektronické knihy; electronic books
• ISBN: 9780080536545; 0080536549; 9780444823632; 0444823638; 1282284975; 9781282284975; 9786612284977; 6612284978
• Physical Description: 1 online resource (viii, 268 pages) : illustrations

In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution...