Thin film processes II
This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to t...
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| Other Authors | , |
|---|---|
| Format | Electronic eBook |
| Language | English |
| Published |
Boston :
Academic Press,
©1991.
|
| Series | Thin film processes ;
2 |
| Subjects | |
| Online Access | Full text |
| ISBN | 9781601192905 1601192908 0080524214 9780080524214 0127282513 9780127282510 |
| Physical Description | 1 online resource (xiii, 866 pages) : illustrations |
Glossary of Terms