Handbook of ion beam processing technology : principles, deposition, film modification, and synthesis

• Other Authors: Cuomo, J. J., Rossnagel, Stephen M., Kaufman, Harold R.
• Format: eBook
• Language: English
• Published: Westwood, N.J. : Noyes Publications, ©1989.
• Edition: Reprint ed.
• Subjects: Ion implantation.; Ion bombardment > Industrial applications.; elektronické knihy; electronic books
• ISBN: 1591249791; 9781591249795
• Physical Description: 1 online resource (xviii, 438 pages) : illustrations