Thin film materials technology : sputtering of compound materials

• Main Author: Wasa, Kiyotaka
• Other Authors: Kitabatake, Makoto, Adachi, Hideaki
• Format: Electronic eBook
• Language: English
• Published: Norwich, NY : Heidelberg : William Andrew Pub. ; Springer, ©2004.
• Subjects: Cathode sputtering (Plating process); Thin films.; elektronické knihy; electronic books
• ISBN: 0815514832; 9780815514831; 9783540211181; 3540211187; 9780815519317; 0815519311; 1282027662; 9781282027664; 9786612027666; 6612027665; 0080946984; 9780080946986
• Physical Description: 1 online resource (xiv, 518 pages) : illustrations

An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key techn...