Characterization in silicon processing

• Other Authors: Strausser, Yale.
• Format: eBook
• Language: English
• Published: Boston : Greenwich : Butterworth-Heinemann ; Manning, ©1993.
• Series: Materials characterization series.
• Subjects: Silicon.; Electric conductors.; Semiconductor films.; Surface chemistry.; elektronické knihy; electronic books
• ISBN: 1591245257; 9781591245254; 9780080523422; 0080523420; 9780750691727; 0750691727
• Physical Description: 1 online resource (xiii, 240 pages) : illustrations

This volume is devoted to the consideration of the use use of surface, thin film and interface characterization tools in support of silicon-based semiconductor processing. The approach taken is to consider each of the types of films used in silicon devices individually in its own chapter and to disc...