Ionized-cluster beam deposition and epitaxy

• Main Author: Takagi, Toshinori.
• Format: eBook
• Language: English
• Published: Park Ridge, N.J., U.S.A. : Noyes Publications, ©1988.
• Series: Materials science and process technology series.
• Subjects: Epitaxy.; Thin film devices > Design and construction.; elektronické knihy; electronic books
• ISBN: 1591241073; 9781591241072; 9780815511687; 081551168X
• Physical Description: 1 online resource (viii, 231 pages) : illustrations

The technique of ionized-cluster beam (ICB) deposition, the fundamentals of ICB technology, and technical applications of thin films produced by ICB deposition are presented for those interested or working in the field. ICB processes are characterized, and equipment is available. The films deposited...