Ionized-cluster beam deposition and epitaxy
The technique of ionized-cluster beam (ICB) deposition, the fundamentals of ICB technology, and technical applications of thin films produced by ICB deposition are presented for those interested or working in the field. ICB processes are characterized, and equipment is available. The films deposited...
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| Main Author | |
|---|---|
| Format | Electronic eBook |
| Language | English |
| Published |
Park Ridge, N.J., U.S.A. :
Noyes Publications,
©1988.
|
| Series | Materials science and process technology series.
|
| Subjects | |
| Online Access | Full text |
| ISBN | 1591241073 9781591241072 9780815511687 081551168X |
| Physical Description | 1 online resource (viii, 231 pages) : illustrations |
Glossary of Terms