High density plasma sources : design, physics, and performance

• Other Authors: Popov, Oleg A.
• Format: eBook
• Language: English
• Published: Park Ridge, N.J. : Noyes Publications, ©1995.
• Series: Materials science and process technology series. Electronic materials and process technology.
• Subjects: Plasma density.; High temperature plasmas.; Plasma generators.; elektronické knihy; electronic books
• ISBN: 1591240638; 9781591240631; 9780815513773; 0815513771; 9780080946160; 008094616X; 9780815517887; 0815517882; 1282755080; 9781282755086; 9786612755088; 6612755083; 1282253212; 9781282253216; 9786612253218; 6612253215; 0815517890; 9780815517894
• Physical Description: 1 online resource (xx, 445 pages) : illustrations

This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielec...