Handbook of physical vapor deposition (PVD) processing : film formation, adhesion, surface preparation and contamination control

• Main Author: Mattox, D. M.
• Format: eBook
• Language: English
• Published: Westwood, N.J. : Noyes Publications, ©1998.
• Subjects: Vapor-plating > Handbooks, manuals, etc.; elektronické knihy; electronic books
• ISBN: 1591240794; 9781591240792; 9780815514220; 0815514220
• Physical Description: 1 online resource (xxvii, 917 pages) : illustrations

Covers aspects of the Physical Vapor Deposition process technology from characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. Includes subjects such as substrate characterization, adhesion, cleaning, and processin...