Semiconductor industrial hygiene handbook : monitoring, ventilation, equipment, and ergonomics

• Main Author: Williams, Michael E., 1949-
• Other Authors: Baldwin, David G., Manz, Paul C.
• Format: Electronic eBook
• Language: English
• Published: Park Ridge, N.J., U.S.A. : Noyes Publications, ©1995.
• Series: Materials science and process technology series.
• Subjects: Semiconductor industry > Employees > Health and hygiene.; Industrial hygiene.; elektronické knihy; electronic books
• ISBN: 1591241448; 9781591241447; 9780815513698; 0815513690
• Physical Description: 1 online resource (xv, 348 pages) : illustrations

This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal...