Handbook of semiconductor silicon technology

• Other Authors: O'Mara, William C., Herring, Robert B., Hunt, Lee P.
• Format: Electronic eBook
• Language: English
• Published: Park Ridge, N.J. : Noyes Publications, ©1990.
• Series: Materials science and process technology series.
• Subjects: Semiconductors > Handbooks, manuals, etc.; Silicon crystals > Handbooks, manuals, etc.; elektronické knihy; electronic books
• ISBN: 1591242940; 9781591242949; 9780815512370; 0815512376
• Physical Description: 1 online resource (xx, 795 pages) : illustrations.

This book is an up-to-date summary of the science, technology and manufacturing of semiconductor silicon materials.