Handbook of semiconductor wafer cleaning technology : science, technology, and applications

• Other Authors: Kern, Werner, 1925-
• Format: eBook
• Language: English
• Published: Park Ridge, N.J., U.S.A. : Noyes Publications, ©1993.
• Series: Materials science and process technology series. Electronic materials and process technology.
• Subjects: Semiconductor wafers > Cleaning.; elektronické knihy; electronic books
• ISBN: 159124093X; 9781591240938; 9780815513315; 0815513313; 0815517726; 9780815517726
• Physical Description: 1 online resource (xx, 623 pages) : illustrations

Discusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field.