Handbook of semiconductor wafer cleaning technology : science, technology, and applications
Discusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field.
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| Other Authors | |
|---|---|
| Format | Electronic eBook |
| Language | English |
| Published |
Park Ridge, N.J., U.S.A. :
Noyes Publications,
©1993.
|
| Series | Materials science and process technology series. Electronic materials and process technology.
|
| Subjects | |
| Online Access | Full text |
| ISBN | 159124093X 9781591240938 9780815513315 0815513313 0815517726 9780815517726 |
| Physical Description | 1 online resource (xx, 623 pages) : illustrations |
Glossary of Terms