Outlook and challenges of nano devices, sensors, and MEMS

• Other Authors: Li, Ting, Liu, Ziv
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer, [2017]
• Subjects: Nanotechnology.; Microelectromechanical systems.; Nanostructured materials.; elektronické knihy; electronic books
• ISBN: 9783319508245; 9783319508221
• Physical Description: 1 online resource (xvi, 521 pages) : illustrations (some color)

This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrica...