Outlook and challenges of nano devices, sensors, and MEMS

This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrica...

Full description

Saved in:
Bibliographic Details
Other Authors: Li, Ting., Liu, Ziv.
Format: eBook
Language: English
Published: Cham : Springer, [2017]
Subjects:
ISBN: 9783319508245
9783319508221
Physical Description: 1 online resource (xvi, 521 pages) : illustrations (some color)

Cover

Table of contents