Piezoelectric MEMS resonators

• Other Authors: Bhugra, Harmeet (Editor), Piazza, Gianluca (Editor)
• Format: Electronic eBook
• Language: English
• Published: Cham, Switzerland : Springer Nature, [2017]
• Series: Microsystems and nanosystems.
• Subjects: mikroelektromechanické systémy; piezoelektrické rezonátory; microelectromechanical systems; piezoelectric resonators; elektronické knihy; sborníky; electronic books; papers of several authors
• ISBN: 9783319286884; 9783319286860
• Physical Description: 1 online resource (424 pages) : illustrations

"This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future res...