Nanofabrication : principles, capabilities and limits

• Main Author: Cui, Zheng, 1954- (Author)
• Format: Electronic eBook
• Language: English
• Published: Switzerland : Springer, [2016]
• Edition: Second edition.
• Subjects: Nanotechnology.; Nanomanufacturing.; elektronické knihy; electronic books
• ISBN: 9783319393612; 9783319393599
• Physical Description: 1 online resource

This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of...