Optical scattering measurement and analysis
The first edition of this book concentrated on relating scatter from optically smooth surfaces to the microroughness on those surfaces. After spending six years in the semiconductor industry, Dr. Stover has updated and expanded the third edition. Newly included are scatter models for pits and partic...
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| Main Author | |
|---|---|
| Corporate Author | |
| Format | Electronic eBook |
| Language | English |
| Published |
Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) :
SPIE,
2012.
|
| Edition | 3rd ed. |
| Series | SPIE monograph ;
PM224. SPIE Digital Library. |
| Subjects | |
| Online Access | Full text |
| ISBN | 9780819492524 9780819492517 |
| Physical Description | 1 online zdroj (xxiv, 302 pages) : illustrations, digital file. |
Glossary of Terms