Resolution enhancement techniques in optical lithography

• Main Author: Wong, Alfred Kwok-Kit.
• Format: eBook
• Language: English
• Published: Bellingham, Wash. : SPIE Press, c2001.
• Series: Tutorial texts in optical engineering ; v. TT 47.
• Subjects: Integrated circuits > Design and construction.; Microlithography.; elektronické knihy; electronic books
• ISBN: 9781615837328; 9780819478818; 9780819439956
• Physical Description: 1 online zdroj (xvii, 214 p.) : ill.

Ever-smaller IC devices are pushing the optical lithography envelope, increasing the importance of resolution enhancement techniques. This tutorial encompasses two decades of research. It discusses theoretical and practical aspects of commonly used techniques, including optical imaging and resolutio...