Optical lithography here is why
This book is aimed at new and experienced engineers, technology managers, and senior technicians who want to enrich their understanding of the image formation physics of a lithographic system. Readers will gain knowledge of the basic equations and constants that drive optical lithography, learn the...
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| Main Author | |
|---|---|
| Corporate Author | |
| Format | Electronic eBook |
| Language | English |
| Published |
Bellingham, Wash. :
SPIE,
2010.
|
| Series | SPIE monograph ;
PM190. |
| Subjects | |
| Online Access | Full text |
| ISBN | 9780819481825 9781615837274 9780819475602 |
| Physical Description | 1 online zdroj (xiv, 477 pages) : illustrations. |
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