Nanolithography and patterning techniques in microelectronics

• Other Authors: Bucknall, David G.
• Format: Electronic eBook
• Language: English
• Published: Cambridge : Boca Raton, FL : Woodhead Pub. ; CRC Press, ©2005.
• Series: Woodhead Publishing in materials.
• Subjects: Microlithography.; Nanotechnology.; elektronické knihy; electronic books
• ISBN: 9781615831869; 9781855739314; 9781845690908; 9780849334474
• Physical Description: 1 online zdroj (xiv, 409 pages) : illustrations.

Currently surface patterning is achieved by means of optical lithographic techniques but with industry moving towards the fabrication of devices with size features of 100 nm less, the technological community is looking for alternative approaches to materials fabrication at the nanoscale. By using na...