Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control
Covers aspects of the Physical Vapor Deposition process technology from characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. Includes subjects such as substrate characterization, adhesion, cleaning, and processin...
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| Main Author | |
|---|---|
| Format | Electronic eBook |
| Language | English |
| Published |
Westwood, N.J. :
Noyes Publications,
©1998.
|
| Subjects | |
| Online Access | Full text |
| ISBN | 9781591240792 9780815514220 |
| Physical Description | 1 online zdroj (xxvii, 917 pages) : illustrations |
Glossary of Terms