Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control

Covers aspects of the Physical Vapor Deposition process technology from characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. Includes subjects such as substrate characterization, adhesion, cleaning, and processin...

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Bibliographic Details
Main Author: Mattox, D. M.
Format: eBook
Language: English
Published: Westwood, N.J. : Noyes Publications, ©1998.
Subjects:
ISBN: 9781591240792
9780815514220
Physical Description: 1 online zdroj (xxvii, 917 pages) : illustrations

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