Developments in surface contamination and cleaning. cleaning techniques Volume 8 :

• Other Authors: Kohli, Rajiv, (Editor), Mittal, K. L., (Editor)
• Format: eBook
• Language: English
• Published: Oxford, England ; Waltham, Massachusetts : William Andrew, 2015.
• Series: Developments in Surface Contamination and Cleaning Series ; Volume 8
• Subjects: Cleaning.; Coatings.; Particles > Measurement.; Surface contamination > Prevention.; Surfaces (Technology) > Inspection.; elektronické knihy; electronic books
• ISBN: 9780323312714; 9780323299619
• Physical Description: 1 online zdroj (235 pages) : illustrations (some color).

As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a who...