Silicon-on-insulator (SOI) technology manufacture and applications
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Other Authors: | , |
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Format: | eBook |
Language: | English |
Published: |
Cambridge, UK ; Waltham, MA :
Woodhead Pub.,
2014.
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Series: | Woodhead Publishing series in electronic and optical materials.
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Subjects: | |
ISBN: | 9780857099259 9780857095268 9781306949132 |
Physical Description: | 1 online zdroj : ill. |
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