Introduction to semiconductor technology

• Main Author: Xiao, Hong.
• Corporate Author: Society of Photo-optical Instrumentation Engineers.
• Format: eBook
• Language: English
• Published: Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE, 2012.
• Edition: 2nd ed.
• Series: SPIE monograph ; PM220.; SPIE Digital Library.
• Subjects: Integrated circuits > Design and construction.; Semiconductors > Design and construction.; Semiconductor industry.; elektronické knihy; electronic books
• ISBN: 9780819490933; 9781628701043; 9780819490926
• Physical Description: 1 online zdroj (xix, 656 pages) : illustrations, digital file.

Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs toda...