A guide to hands-on MEMS design and prototyping

"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fa...

Full description

Saved in:
Bibliographic Details
Main Author: Kubby, Joel A.
Format: eBook
Language: English
Published: Cambridge, UK ; New York : Cambridge University Press, 2011.
Subjects:
Microelectromechanical systems.
elektronické knihy
electronic books
ISBN: 9781139109895
9781139127080
9780511984662
9781139114257
9781139116428
9781139122160
9780521889254
9781107645790
Physical Description: 1 online zdroj (xi, 166 pages, [16] pages of plates) : illustrations (some color)

Cover

Table of contents

ikona NpovdaGlossary of Terms
Online Access: Online Resources

Similar Items