Physics of radio-frequency plasmas

• Main Author: Chabert, Pascal, 1969-
• Other Authors: Braithwaite, Nicholas
• Format: eBook
• Language: English
• Published: Cambridge ; New York : Cambridge University Press, 2011.
• Subjects: Low temperature plasmas.; Radio frequency.; elektronické knihy; electronic books
• ISBN: 9780511861017; 9780511974342; 9780511856662; 9780521763004
• Physical Description: 1 online zdroj (viii, 385 p.) : ill.

"Low-temperature radio-frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on phy...