Physics of radio-frequency plasmas
"Low-temperature radio-frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on phy...
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| Main Author | |
|---|---|
| Other Authors | |
| Format | eBook |
| Language | English |
| Published |
Cambridge ; New York :
Cambridge University Press,
2011.
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| Subjects | |
| Online Access | Full text |
| ISBN | 9780511861017 9780511974342 9780511856662 9780521763004 |
| Physical Description | 1 online zdroj (viii, 385 p.) : ill. |
Glossary of Terms