Lithography process control

• Main Author: Levinson, Harry J.
• Format: eBook
• Language: English
• Published: Bellingham, Wash. : SPIE Optical Engineering Press, c1999.
• Series: Tutorial texts in optical engineering ; v. TT 28.
• Subjects: Semiconductors > Etching.; Microlithography > Quality control.; elektronické knihy; electronic books
• ISBN: 9781615837366; 9780819478559; 9780819430526
• Physical Description: 1 online zdroj (x, 190 p.) : ill.

This text covers lithography process control at several levels, from fundamental through advanced topics. The book is a self-contained tutorial that works both as an introduction to the technology and as a reference for the experienced lithographer. It reviews the foundations of statistical process...