Handbook of Ion Beam Processing Technology Principles, Deposition, Film Modification and Synthesis.

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Bibliographic Details
Main Authors: Cuomo, Jerome J., (Editor), Kaufman, Harold R., (Editor), Haber, Stephen M., (Editor)
Other Authors: Rossnagel, Stephen M., (Editor)
Format: eBook
Language: English
Published: Burlington : Saint Louis : Noyes Publications [Imprint] William Andrew, Inc. Elsevier Science & Technology Books [distributor] Dec. 1989
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ISBN: 9780815511991
Physical Description: 1 online zdroj (456 p.) ill.

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