Handbook of Ion Beam Processing Technology Principles, Deposition, Film Modification and Synthesis.

• Main Authors: Cuomo, Jerome J. (Author, Editor), Kaufman, Harold R. (Author, Editor), Haber, Stephen M. (Author, Editor)
• Other Authors: Rossnagel, Stephen M. (Editor)
• Format: eBook
• Language: English
• Published: Burlington : Saint Louis : Noyes Publications [Imprint] William Andrew, Inc. Elsevier Science & Technology Books [distributor] Dec. 1989
• Subjects: Ion implantation.; Ion bombardment > Industrial applications.; elektronické knihy; electronic books
• ISBN: 9780815511991
• Physical Description: 1 online zdroj (456 p.) ill.